% IMPORTANT: The following is UTF-8 encoded.  This means that in the presence
% of non-ASCII characters, it will not work with BibTeX 0.99 or older.
% Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or
% “biber”.

@ARTICLE{Starschich:186503,
      author       = {Starschich, S. and Griesche, D. and Schneller, T. and
                      Waser, R. and Böttger, U.},
      title        = {{C}hemical solution deposition of ferroelectric
                      yttrium-doped hafnium oxide films on platinum electrodes},
      journal      = {Applied physics letters},
      volume       = {104},
      number       = {20},
      issn         = {1077-3118},
      address      = {Melville, NY},
      publisher    = {American Inst. of Physics},
      reportid     = {FZJ-2015-00577},
      pages        = {202903},
      year         = {2014},
      abstract     = {Ferroelectric hafnium oxide films were fabricated by
                      chemical solution deposition with a remnant polarization of
                      >13 μC/cm2. The samples were prepared with
                      $5.2 mol. \%$ yttrium-doping and the thickness varied
                      from 18 nm to 70 nm. The hafnium oxide layer was
                      integrated into a metal-insulator-metal capacitor using
                      platinum electrodes. Due to the processing procedure, no
                      thickness dependence of the ferroelectric properties was
                      observed. To confirm the ferroelectric nature of the
                      deposited samples, polarization, capacitance, and
                      piezoelectric displacement measurements were performed.
                      However, no evidence of the orthorhombic phase was found
                      which has been proposed to be the non-centrosymmetric,
                      ferroelectric phase in HfO2.},
      cin          = {PGI-7},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-7-20110106},
      pnm          = {424 - Exploratory materials and phenomena (POF2-424)},
      pid          = {G:(DE-HGF)POF2-424},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000337140800051},
      doi          = {10.1063/1.4879283},
      url          = {https://juser.fz-juelich.de/record/186503},
}