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@ARTICLE{Guo:186651,
author = {Guo, Yuanyuan and Miyamoto, Ko-ichiro and Wagner, Torsten
and Schöning, Michael J. and Yoshinobu, Tatsuo},
title = {{D}evice simulation of the light-addressable potentiometric
sensor for the investigation of the spatial resolution},
journal = {Sensors and actuators / B},
volume = {204},
issn = {0925-4005},
address = {Amsterdam [u.a.]},
publisher = {Elsevier Science},
reportid = {FZJ-2015-00724},
pages = {659 - 665},
year = {2014},
abstract = {As a semiconductor-based electrochemical sensor, the
light-addressable potentiometric sensor (LAPS) can realize
two dimensional visualization of (bio-)chemical reactions at
the sensor surface addressed by localized illumination.
Thanks to this imaging capability, various applications in
biochemical and biomedical fields are expected, for which
the spatial resolution is critically significant. In this
study, therefore, the spatial resolution of the LAPS was
investigated in detail based on the device simulation. By
calculating the spatiotemporal change of the distributions
of electrons and holes inside the semiconductor layer in
response to a modulated illumination, the photocurrent
response as well as the spatial resolution was obtained as a
function of various parameters such as the thickness of the
Si substrate, the doping concentration, the wavelength and
the intensity of illumination.The simulation results
verified that both thinning the semiconductor substrate and
increasing the doping concentration could improve the
spatial resolution, which were in good agreement with known
experimental results and theoretical analysis. More
importantly, new findings of interests were also obtained.
As for the dependence on the wavelength of illumination, it
was found that the known dependence was not always the case.
When the Si substrate was thick, a longer wavelength
resulted in a higher spatial resolution which was known by
experiments. When the Si substrate was thin, however, a
longer wavelength of light resulted in a lower spatial
resolution. This finding was explained as an effect of
raised concentration of carriers, which reduced the
thickness of the space charge region.The device simulation
was found to be helpful to understand the relationship
between the spatial resolution and device parameters, to
understand the physics behind it, and to optimize the device
structure and measurement conditions for realizing higher
performance of chemical imaging systems.},
cin = {PGI-8 / JARA-FIT},
ddc = {530},
cid = {I:(DE-Juel1)PGI-8-20110106 / $I:(DE-82)080009_20140620$},
pnm = {423 - Sensorics and bioinspired systems (POF2-423)},
pid = {G:(DE-HGF)POF2-423},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000343116400083},
doi = {10.1016/j.snb.2014.08.016},
url = {https://juser.fz-juelich.de/record/186651},
}