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000187123 1001_ $$0P:(DE-HGF)0$$aXie, J.$$b0$$eCorresponding Author
000187123 245__ $$aChemical Vapor Deposition of Lithium Phosphate Thin-Film for 3D All-Solid-State Li-Ion Batteries
000187123 260__ $$aPennington, NJ$$bElectrochemical Soc.$$c2015
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000187123 520__ $$aHigh quality Lithium phosphate (Li3PO4) thin films have been deposited by metal-organic chemical vapor deposition (MOCVD), using tert-butyllithium and trimethyl phosphate as precursors. The Li3PO4 films deposited at 300°C yielded the highest ionic conductivity (3.9 × 10−8 S·cm−1). Increasing the deposition temperature led to crystallization of the deposited films and, consequently, to lower ionic conductivities. Kinetic studies on planar substrates showed that Li3PO4 deposition is a diffusion-controlled process in the temperature range of 300 to 500°C. Li3PO4 films have also been deposited on highly structured substrates to investigate, for the first time, the feasibility of 3D deposition of Li3PO4 by MOCVD. Furthermore, very thin films of Li3PO4 have been deposited onto thin film Si anodes and it was found that these layers effectively suppress the SEI formation and dramatically improve the cycle performance of Si film anodes.
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000187123 7001_ $$0P:(DE-HGF)0$$aOudenhoven, J. F. M.$$b1
000187123 7001_ $$0P:(DE-HGF)0$$aHarks, P.-P. R. M. L.$$b2
000187123 7001_ $$0P:(DE-HGF)0$$aLi, Dongjian$$b3
000187123 7001_ $$0P:(DE-Juel1)165918$$aNotten, P. H. L.$$b4$$ufzj
000187123 773__ $$0PERI:(DE-600)2002179-3$$a10.1149/2.0091503jes$$gVol. 162, no. 3, p. A249 - A254$$n3$$pA249 - A254$$tJournal of the Electrochemical Society$$v162$$x1945-7111$$y2015
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