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@ARTICLE{Xie:187123,
      author       = {Xie, J. and Oudenhoven, J. F. M. and Harks, P.-P. R. M. L.
                      and Li, Dongjian and Notten, P. H. L.},
      title        = {{C}hemical {V}apor {D}eposition of {L}ithium {P}hosphate
                      {T}hin-{F}ilm for 3{D} {A}ll-{S}olid-{S}tate {L}i-{I}on
                      {B}atteries},
      journal      = {Journal of the Electrochemical Society},
      volume       = {162},
      number       = {3},
      issn         = {1945-7111},
      address      = {Pennington, NJ},
      publisher    = {Electrochemical Soc.},
      reportid     = {FZJ-2015-00797},
      pages        = {A249 - A254},
      year         = {2015},
      abstract     = {High quality Lithium phosphate (Li3PO4) thin films have
                      been deposited by metal-organic chemical vapor deposition
                      (MOCVD), using tert-butyllithium and trimethyl phosphate as
                      precursors. The Li3PO4 films deposited at 300°C yielded the
                      highest ionic conductivity (3.9 × 10−8 S·cm−1).
                      Increasing the deposition temperature led to crystallization
                      of the deposited films and, consequently, to lower ionic
                      conductivities. Kinetic studies on planar substrates showed
                      that Li3PO4 deposition is a diffusion-controlled process in
                      the temperature range of 300 to 500°C. Li3PO4 films have
                      also been deposited on highly structured substrates to
                      investigate, for the first time, the feasibility of 3D
                      deposition of Li3PO4 by MOCVD. Furthermore, very thin films
                      of Li3PO4 have been deposited onto thin film Si anodes and
                      it was found that these layers effectively suppress the SEI
                      formation and dramatically improve the cycle performance of
                      Si film anodes.},
      cin          = {IEK-9},
      ddc          = {540},
      cid          = {I:(DE-Juel1)IEK-9-20110218},
      pnm          = {135 - Fuel Cells (POF3-135)},
      pid          = {G:(DE-HGF)POF3-135},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000349823700001},
      doi          = {10.1149/2.0091503jes},
      url          = {https://juser.fz-juelich.de/record/187123},
}