% IMPORTANT: The following is UTF-8 encoded.  This means that in the presence
% of non-ASCII characters, it will not work with BibTeX 0.99 or older.
% Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or
% “biber”.

@ARTICLE{Zhuang:187196,
      author       = {Zhuang, Chunqiang and Schlempert, Christoph and Fuchs,
                      Regina and Zhang, Lei and Huang, Nan and Vogel, Michael and
                      Staedtler, Thorsten and Jiang, Xin},
      title        = {{M}echanical behavior related to various bonding states in
                      amorphous {S}i–{C}–{N} hard films},
      journal      = {Surface and coatings technology},
      volume       = {258},
      issn         = {0257-8972},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier Science},
      reportid     = {FZJ-2015-00870},
      pages        = {353 - 358},
      year         = {2014},
      abstract     = {A series of amorphous Si–C–N hard films were prepared
                      by an electron cyclotron resonance chemical vapor deposition
                      method. Microstructure characterization revealed that
                      amorphous Si–C–N hard films contained various bonding
                      states. Among them, Sisingle bondN and Sisingle bondC bonds
                      played a leading role in determining the microstructure of
                      amorphous Si–C–N hard films. Mechanical measurements
                      showed that the hardness of these films varied between 17
                      GPa and 28 GPa as a function of the tetramethylsilane flow
                      rate. A close relation between various bonding states and
                      hardness was found. The variation of hardness was dominated
                      by the bond fraction that corresponded to various bonding
                      states. Macroscopic mechanical properties of a material were
                      illustrated from the perspective of microscopic structural
                      characterization.},
      cin          = {PGI-5},
      ddc          = {620},
      cid          = {I:(DE-Juel1)PGI-5-20110106},
      pnm          = {42G - Peter Grünberg-Centre (PG-C) (POF2-42G41)},
      pid          = {G:(DE-HGF)POF2-42G41},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000346895000044},
      doi          = {10.1016/j.surfcoat.2014.09.002},
      url          = {https://juser.fz-juelich.de/record/187196},
}