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| Hauptseite > Publikationsdatenbank > Mechanical behavior related to various bonding states in amorphous Si–C–N hard films > print |
| Hauptseite > Publikationsdatenbank > Mechanical behavior related to various bonding states in amorphous Si–C–N hard films > print |
| 001 | 187196 | ||
| 005 | 20240610121121.0 | ||
| 024 | 7 | _ | |2 doi |a 10.1016/j.surfcoat.2014.09.002 |
| 024 | 7 | _ | |a WOS:000346895000044 |2 WOS |
| 037 | _ | _ | |a FZJ-2015-00870 |
| 041 | _ | _ | |a English |
| 082 | _ | _ | |a 620 |
| 100 | 1 | _ | |0 P:(DE-HGF)0 |a Zhuang, Chunqiang |b 0 |e Corresponding Author |
| 245 | _ | _ | |a Mechanical behavior related to various bonding states in amorphous Si–C–N hard films |
| 260 | _ | _ | |a Amsterdam [u.a.] |b Elsevier Science |c 2014 |
| 336 | 7 | _ | |a Journal Article |b journal |m journal |0 PUB:(DE-HGF)16 |s 1422343792_24689 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a Output Types/Journal article |2 DataCite |
| 336 | 7 | _ | |a Journal Article |0 0 |2 EndNote |
| 336 | 7 | _ | |a ARTICLE |2 BibTeX |
| 336 | 7 | _ | |a JOURNAL_ARTICLE |2 ORCID |
| 336 | 7 | _ | |a article |2 DRIVER |
| 520 | _ | _ | |a A series of amorphous Si–C–N hard films were prepared by an electron cyclotron resonance chemical vapor deposition method. Microstructure characterization revealed that amorphous Si–C–N hard films contained various bonding states. Among them, Sisingle bondN and Sisingle bondC bonds played a leading role in determining the microstructure of amorphous Si–C–N hard films. Mechanical measurements showed that the hardness of these films varied between 17 GPa and 28 GPa as a function of the tetramethylsilane flow rate. A close relation between various bonding states and hardness was found. The variation of hardness was dominated by the bond fraction that corresponded to various bonding states. Macroscopic mechanical properties of a material were illustrated from the perspective of microscopic structural characterization. |
| 536 | _ | _ | |0 G:(DE-HGF)POF2-42G41 |a 42G - Peter Grünberg-Centre (PG-C) (POF2-42G41) |c POF2-42G41 |f POF II |x 0 |
| 700 | 1 | _ | |0 P:(DE-HGF)0 |a Schlempert, Christoph |b 1 |
| 700 | 1 | _ | |0 P:(DE-HGF)0 |a Fuchs, Regina |b 2 |
| 700 | 1 | _ | |0 P:(DE-Juel1)140353 |a Zhang, Lei |b 3 |u fzj |
| 700 | 1 | _ | |0 P:(DE-HGF)0 |a Huang, Nan |b 4 |
| 700 | 1 | _ | |0 P:(DE-Juel1)130188 |a Vogel, Michael |b 5 |u fzj |
| 700 | 1 | _ | |0 P:(DE-HGF)0 |a Staedtler, Thorsten |b 6 |
| 700 | 1 | _ | |0 P:(DE-HGF)0 |a Jiang, Xin |b 7 |
| 773 | _ | _ | |0 PERI:(DE-600)1502240-7 |a 10.1016/j.surfcoat.2014.09.002 |p 353 - 358 |t Surface and coatings technology |v 258 |x 0257-8972 |y 2014 |
| 856 | 4 | _ | |u https://juser.fz-juelich.de/record/187196/files/FZJ-2015-00870.pdf |y Restricted |
| 909 | C | O | |o oai:juser.fz-juelich.de:187196 |p VDB |
| 910 | 1 | _ | |0 I:(DE-588b)5008462-8 |6 P:(DE-Juel1)140353 |a Forschungszentrum Jülich GmbH |b 3 |k FZJ |
| 910 | 1 | _ | |0 I:(DE-588b)5008462-8 |6 P:(DE-Juel1)130188 |a Forschungszentrum Jülich GmbH |b 5 |k FZJ |
| 913 | 2 | _ | |0 G:(DE-HGF)POF3-143 |1 G:(DE-HGF)POF3-140 |2 G:(DE-HGF)POF3-100 |a DE-HGF |b Forschungsbereich Energie |l Future Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT) |v Controlling Configuration-Based Phenomena |x 0 |
| 913 | 1 | _ | |0 G:(DE-HGF)POF2-42G41 |1 G:(DE-HGF)POF2-420 |2 G:(DE-HGF)POF2-400 |a DE-HGF |b Schlüsseltechnologien |v Peter Grünberg-Centre (PG-C) |x 0 |4 G:(DE-HGF)POF |3 G:(DE-HGF)POF2 |l Grundlagen zukünftiger Informationstechnologien |
| 914 | 1 | _ | |y 2014 |
| 915 | _ | _ | |a JCR |0 StatID:(DE-HGF)0100 |2 StatID |
| 915 | _ | _ | |a WoS |0 StatID:(DE-HGF)0110 |2 StatID |b Science Citation Index |
| 915 | _ | _ | |a WoS |0 StatID:(DE-HGF)0111 |2 StatID |b Science Citation Index Expanded |
| 915 | _ | _ | |a DBCoverage |0 StatID:(DE-HGF)0150 |2 StatID |b Web of Science Core Collection |
| 915 | _ | _ | |a DBCoverage |0 StatID:(DE-HGF)0199 |2 StatID |b Thomson Reuters Master Journal List |
| 915 | _ | _ | |a DBCoverage |0 StatID:(DE-HGF)0200 |2 StatID |b SCOPUS |
| 915 | _ | _ | |a DBCoverage |0 StatID:(DE-HGF)0300 |2 StatID |b Medline |
| 915 | _ | _ | |a Nationallizenz |0 StatID:(DE-HGF)0420 |2 StatID |
| 915 | _ | _ | |a DBCoverage |0 StatID:(DE-HGF)1160 |2 StatID |b Current Contents - Engineering, Computing and Technology |
| 915 | _ | _ | |a IF < 5 |0 StatID:(DE-HGF)9900 |2 StatID |
| 920 | _ | _ | |l yes |
| 920 | 1 | _ | |0 I:(DE-Juel1)PGI-5-20110106 |k PGI-5 |l Mikrostrukturforschung |x 0 |
| 980 | _ | _ | |a journal |
| 980 | _ | _ | |a VDB |
| 980 | _ | _ | |a I:(DE-Juel1)PGI-5-20110106 |
| 980 | _ | _ | |a UNRESTRICTED |
| 981 | _ | _ | |a I:(DE-Juel1)ER-C-1-20170209 |
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