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000187387 0247_ $$2doi$$a10.1103/PhysRevB.90.214305
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000187387 1001_ $$0P:(DE-HGF)0$$aTan, Haiyan$$b0$$eCorresponding Author
000187387 245__ $$aEnergy-loss-and thickness-dependent contrast in atomic-scale electron energy-loss spectroscopy
000187387 260__ $$aCollege Park, Md.$$bAPS$$c2014
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000187387 520__ $$aAtomic-scale elemental maps of materials acquired by core-loss inelastic electron scattering often exhibit an undesirable sensitivity to the unavoidable elastic scattering, making the maps counterintuitive to interpret. Here, we present a systematic study that scrutinizes the energy-loss and sample-thickness dependence of atomic-scale elemental maps acquired using 100-keV incident electrons in a scanning transmission electron microscope. For single-crystal silicon, the balance between elastic and inelastic scattering means that maps generated from the near-threshold Si−L signal (energy loss of 99 eV) show no discernible contrast for a thickness of 0.5λ (λ is the electron mean-free path, here approximately 110 nm). At greater thicknesses we observe a counterintuitive “negative” contrast. Only at much higher energy losses is an intuitive “positive” contrast gradually restored. Our quantitative analysis shows that the energy loss at which a positive contrast is restored depends linearly on the sample thickness. This behavior is in very good agreement with our double-channeling inelastic scattering calculations. We test a recently proposed experimental method to correct the core-loss inelastic scattering and restore an intuitive “positive” chemical contrast. The method is demonstrated to be reliable over a large range of energy losses and sample thicknesses. The corrected contrast for near-threshold maps is demonstrated to be (desirably) inversely proportional to sample thickness. Implications for the interpretation of atomic-scale elemental maps are discussed.
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000187387 542__ $$2Crossref$$i2014-12-31$$uhttp://link.aps.org/licenses/aps-default-license
000187387 542__ $$2Crossref$$i2015-12-31$$uhttp://link.aps.org/licenses/aps-default-accepted-manuscript-license
000187387 7001_ $$0P:(DE-HGF)0$$aZhu, Ye$$b1
000187387 7001_ $$0P:(DE-Juel1)159157$$aDwyer, Christian$$b2$$ufzj
000187387 7001_ $$0P:(DE-HGF)0$$aXin, Huolin$$b3
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000187387 9132_ $$0G:(DE-HGF)POF3-143$$1G:(DE-HGF)POF3-140$$2G:(DE-HGF)POF3-100$$aDE-HGF$$bForschungsbereich Energie$$lFuture Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT)$$vControlling Configuration-Based Phenomena$$x0
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