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@ARTICLE{Tan:187387,
      author       = {Tan, Haiyan and Zhu, Ye and Dwyer, Christian and Xin,
                      Huolin},
      title        = {{E}nergy-loss-and thickness-dependent contrast in
                      atomic-scale electron energy-loss spectroscopy},
      journal      = {Physical review / B},
      volume       = {90},
      number       = {21},
      issn         = {1098-0121},
      address      = {College Park, Md.},
      publisher    = {APS},
      reportid     = {FZJ-2015-01058},
      pages        = {214305},
      year         = {2014},
      abstract     = {Atomic-scale elemental maps of materials acquired by
                      core-loss inelastic electron scattering often exhibit an
                      undesirable sensitivity to the unavoidable elastic
                      scattering, making the maps counterintuitive to interpret.
                      Here, we present a systematic study that scrutinizes the
                      energy-loss and sample-thickness dependence of atomic-scale
                      elemental maps acquired using 100-keV incident electrons in
                      a scanning transmission electron microscope. For
                      single-crystal silicon, the balance between elastic and
                      inelastic scattering means that maps generated from the
                      near-threshold Si−L signal (energy loss of 99 eV) show no
                      discernible contrast for a thickness of 0.5λ (λ is the
                      electron mean-free path, here approximately 110 nm). At
                      greater thicknesses we observe a counterintuitive
                      “negative” contrast. Only at much higher energy losses
                      is an intuitive “positive” contrast gradually restored.
                      Our quantitative analysis shows that the energy loss at
                      which a positive contrast is restored depends linearly on
                      the sample thickness. This behavior is in very good
                      agreement with our double-channeling inelastic scattering
                      calculations. We test a recently proposed experimental
                      method to correct the core-loss inelastic scattering and
                      restore an intuitive “positive” chemical contrast. The
                      method is demonstrated to be reliable over a large range of
                      energy losses and sample thicknesses. The corrected contrast
                      for near-threshold maps is demonstrated to be (desirably)
                      inversely proportional to sample thickness. Implications for
                      the interpretation of atomic-scale elemental maps are
                      discussed.},
      cin          = {PGI-5},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-5-20110106},
      pnm          = {42G - Peter Grünberg-Centre (PG-C) (POF2-42G41)},
      pid          = {G:(DE-HGF)POF2-42G41},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000349891100002},
      doi          = {10.1103/PhysRevB.90.214305},
      url          = {https://juser.fz-juelich.de/record/187387},
}