001     187387
005     20240610121125.0
024 7 _ |2 doi
|a 10.1103/PhysRevB.90.214305
024 7 _ |2 Handle
|a 2128/8331
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037 _ _ |a FZJ-2015-01058
041 _ _ |a English
082 _ _ |a 530
100 1 _ |0 P:(DE-HGF)0
|a Tan, Haiyan
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245 _ _ |a Energy-loss-and thickness-dependent contrast in atomic-scale electron energy-loss spectroscopy
260 _ _ |a College Park, Md.
|b APS
|c 2014
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520 _ _ |a Atomic-scale elemental maps of materials acquired by core-loss inelastic electron scattering often exhibit an undesirable sensitivity to the unavoidable elastic scattering, making the maps counterintuitive to interpret. Here, we present a systematic study that scrutinizes the energy-loss and sample-thickness dependence of atomic-scale elemental maps acquired using 100-keV incident electrons in a scanning transmission electron microscope. For single-crystal silicon, the balance between elastic and inelastic scattering means that maps generated from the near-threshold Si−L signal (energy loss of 99 eV) show no discernible contrast for a thickness of 0.5λ (λ is the electron mean-free path, here approximately 110 nm). At greater thicknesses we observe a counterintuitive “negative” contrast. Only at much higher energy losses is an intuitive “positive” contrast gradually restored. Our quantitative analysis shows that the energy loss at which a positive contrast is restored depends linearly on the sample thickness. This behavior is in very good agreement with our double-channeling inelastic scattering calculations. We test a recently proposed experimental method to correct the core-loss inelastic scattering and restore an intuitive “positive” chemical contrast. The method is demonstrated to be reliable over a large range of energy losses and sample thicknesses. The corrected contrast for near-threshold maps is demonstrated to be (desirably) inversely proportional to sample thickness. Implications for the interpretation of atomic-scale elemental maps are discussed.
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542 _ _ |i 2014-12-31
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542 _ _ |i 2015-12-31
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|a Zhu, Ye
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700 1 _ |0 P:(DE-HGF)0
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773 1 8 |a 10.1103/physrevb.90.214305
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|t Physical Review B
|v 90
|y 2014
|x 1098-0121
773 _ _ |a 10.1103/PhysRevB.90.214305
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