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| 001 | 187387 | ||
| 005 | 20240610121125.0 | ||
| 024 | 7 | _ | |2 doi |a 10.1103/PhysRevB.90.214305 |
| 024 | 7 | _ | |2 Handle |a 2128/8331 |
| 024 | 7 | _ | |2 WOS |a WOS:000349891100002 |
| 037 | _ | _ | |a FZJ-2015-01058 |
| 041 | _ | _ | |a English |
| 082 | _ | _ | |a 530 |
| 100 | 1 | _ | |0 P:(DE-HGF)0 |a Tan, Haiyan |b 0 |e Corresponding Author |
| 245 | _ | _ | |a Energy-loss-and thickness-dependent contrast in atomic-scale electron energy-loss spectroscopy |
| 260 | _ | _ | |a College Park, Md. |b APS |c 2014 |
| 336 | 7 | _ | |0 PUB:(DE-HGF)16 |2 PUB:(DE-HGF) |a Journal Article |b journal |m journal |s 1422541973_8065 |
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| 336 | 7 | _ | |2 BibTeX |a ARTICLE |
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| 520 | _ | _ | |a Atomic-scale elemental maps of materials acquired by core-loss inelastic electron scattering often exhibit an undesirable sensitivity to the unavoidable elastic scattering, making the maps counterintuitive to interpret. Here, we present a systematic study that scrutinizes the energy-loss and sample-thickness dependence of atomic-scale elemental maps acquired using 100-keV incident electrons in a scanning transmission electron microscope. For single-crystal silicon, the balance between elastic and inelastic scattering means that maps generated from the near-threshold Si−L signal (energy loss of 99 eV) show no discernible contrast for a thickness of 0.5λ (λ is the electron mean-free path, here approximately 110 nm). At greater thicknesses we observe a counterintuitive “negative” contrast. Only at much higher energy losses is an intuitive “positive” contrast gradually restored. Our quantitative analysis shows that the energy loss at which a positive contrast is restored depends linearly on the sample thickness. This behavior is in very good agreement with our double-channeling inelastic scattering calculations. We test a recently proposed experimental method to correct the core-loss inelastic scattering and restore an intuitive “positive” chemical contrast. The method is demonstrated to be reliable over a large range of energy losses and sample thicknesses. The corrected contrast for near-threshold maps is demonstrated to be (desirably) inversely proportional to sample thickness. Implications for the interpretation of atomic-scale elemental maps are discussed. |
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| 542 | _ | _ | |i 2014-12-31 |2 Crossref |u http://link.aps.org/licenses/aps-default-license |
| 542 | _ | _ | |i 2015-12-31 |2 Crossref |u http://link.aps.org/licenses/aps-default-accepted-manuscript-license |
| 700 | 1 | _ | |0 P:(DE-HGF)0 |a Zhu, Ye |b 1 |
| 700 | 1 | _ | |0 P:(DE-Juel1)159157 |a Dwyer, Christian |b 2 |u fzj |
| 700 | 1 | _ | |0 P:(DE-HGF)0 |a Xin, Huolin |b 3 |
| 773 | 1 | 8 | |a 10.1103/physrevb.90.214305 |b American Physical Society (APS) |d 2014-12-31 |n 21 |p 214305 |3 journal-article |2 Crossref |t Physical Review B |v 90 |y 2014 |x 1098-0121 |
| 773 | _ | _ | |a 10.1103/PhysRevB.90.214305 |0 PERI:(DE-600)2844160-6 |n 21 |p 214305 |t Physical review / B |v 90 |y 2014 |x 1098-0121 |
| 856 | 4 | _ | |u https://juser.fz-juelich.de/record/187387/files/FZJ-2015-01058.pdf |y OpenAccess |
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| 914 | 1 | _ | |y 2014 |
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