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000188189 0247_ $$2doi$$a10.1002/pssc.201400117
000188189 0247_ $$2ISSN$$a1610-1634
000188189 0247_ $$2ISSN$$a1610-1642
000188189 0247_ $$2ISSN$$a1862-6351
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000188189 037__ $$aFZJ-2015-01644
000188189 041__ $$aEnglish
000188189 082__ $$a530
000188189 1001_ $$0P:(DE-HGF)0$$aDanylyuk, Serhiy$$b0$$eCorresponding Author
000188189 245__ $$aMulti-angle spectroscopic extreme ultraviolet reflectometry for analysis of thin films and interfaces
000188189 260__ $$aBerlin$$bWiley-VCH$$c2015
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000188189 520__ $$aModern nanotechnology is constantly raising demands to quality and purity of thin films and interlayer interfaces. As thicknesses of employed layers decrease to single nanometers, traditional characterization tools are no longer able to satisfy throughput, precision or non-destructibility requirements. Extreme ultraviolet (EUV) and soft X-ray reflectometry has not only demonstrated the ability to detect sub-nm thickness variations but also was shown to be very sensitive to chemical composition changes. Since the laboratory radiation sources in this wavelength range often emit in a relatively broad spectral range, a spectroscopic EUV reflectometry has been developed with the added benefit of a rapid measuring time on the order of milliseconds to seconds. In this paper, the extension of the method to multi-angle measurements will be presented. It allows to reduce a number of fit parameters in the analysis model, making the method suitable for complex samples of unknown composition. First experimental examples for Si-based layer systems measured under grazing incidence angles between 2° and 15° will be demonstrated and discussed. (© 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)
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000188189 7001_ $$0P:(DE-HGF)0$$aHerbert, Stefan$$b1
000188189 7001_ $$0P:(DE-HGF)0$$aLoosen, Peter$$b2
000188189 7001_ $$0P:(DE-HGF)0$$aLebert, Rainer$$b3
000188189 7001_ $$0P:(DE-Juel1)144017$$aSchäfer, Anna$$b4$$ufzj
000188189 7001_ $$0P:(DE-Juel1)128631$$aSchubert, Jürgen$$b5$$ufzj
000188189 7001_ $$0P:(DE-HGF)0$$aTryus, Maksym$$b6
000188189 7001_ $$0P:(DE-Juel1)157957$$aJuschkin, Larissa$$b7$$ufzj
000188189 773__ $$0PERI:(DE-600)2102966-0$$a10.1002/pssc.201400117$$gp. n/a - n/a$$n3$$p318–322$$tPhysica status solidi / C$$v12$$x1862-6351$$y2015
000188189 8564_ $$uhttp://onlinelibrary.wiley.com/doi/10.1002/pssc.201400117/abstract;jsessionid=92919922850ED89F888D096914321343.f04t04
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