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@ARTICLE{Danylyuk:188189,
      author       = {Danylyuk, Serhiy and Herbert, Stefan and Loosen, Peter and
                      Lebert, Rainer and Schäfer, Anna and Schubert, Jürgen and
                      Tryus, Maksym and Juschkin, Larissa},
      title        = {{M}ulti-angle spectroscopic extreme ultraviolet
                      reflectometry for analysis of thin films and interfaces},
      journal      = {Physica status solidi / C},
      volume       = {12},
      number       = {3},
      issn         = {1862-6351},
      address      = {Berlin},
      publisher    = {Wiley-VCH},
      reportid     = {FZJ-2015-01644},
      pages        = {318–322},
      year         = {2015},
      abstract     = {Modern nanotechnology is constantly raising demands to
                      quality and purity of thin films and interlayer interfaces.
                      As thicknesses of employed layers decrease to single
                      nanometers, traditional characterization tools are no longer
                      able to satisfy throughput, precision or non-destructibility
                      requirements. Extreme ultraviolet (EUV) and soft X-ray
                      reflectometry has not only demonstrated the ability to
                      detect sub-nm thickness variations but also was shown to be
                      very sensitive to chemical composition changes. Since the
                      laboratory radiation sources in this wavelength range often
                      emit in a relatively broad spectral range, a spectroscopic
                      EUV reflectometry has been developed with the added benefit
                      of a rapid measuring time on the order of milliseconds to
                      seconds. In this paper, the extension of the method to
                      multi-angle measurements will be presented. It allows to
                      reduce a number of fit parameters in the analysis model,
                      making the method suitable for complex samples of unknown
                      composition. First experimental examples for Si-based layer
                      systems measured under grazing incidence angles between 2°
                      and 15° will be demonstrated and discussed. (© 2015
                      WILEY-VCH Verlag GmbH $\&$ Co. KGaA, Weinheim)},
      cin          = {PGI-9 / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000360164800014},
      doi          = {10.1002/pssc.201400117},
      url          = {https://juser.fz-juelich.de/record/188189},
}