000189056 001__ 189056 000189056 005__ 20210129215308.0 000189056 0247_ $$2doi$$a10.1063/1.4906616 000189056 0247_ $$2ISSN$$a0021-8979 000189056 0247_ $$2ISSN$$a0148-6349 000189056 0247_ $$2ISSN$$a1089-7550 000189056 0247_ $$2WOS$$aWOS:000348998200054 000189056 0247_ $$2Handle$$a2128/16810 000189056 037__ $$aFZJ-2015-02298 000189056 041__ $$aEnglish 000189056 082__ $$a530 000189056 1001_ $$0P:(DE-HGF)0$$aDi Gaspare, L.$$b0$$eCorresponding Author 000189056 245__ $$aEpi-cleaning of Ge/GeSn heterostructures1 000189056 260__ $$aMelville, NY$$bAmerican Inst. of Physics$$c2015 000189056 3367_ $$2DRIVER$$aarticle 000189056 3367_ $$2DataCite$$aOutput Types/Journal article 000189056 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article$$bjournal$$mjournal$$s1428476735_1879 000189056 3367_ $$2BibTeX$$aARTICLE 000189056 3367_ $$2ORCID$$aJOURNAL_ARTICLE 000189056 3367_ $$00$$2EndNote$$aJournal Article 000189056 520__ $$aWe demonstrate a very-low temperature cleaning technique based on atomic hydrogen irradiation for highly (1%) tensile strained Ge epilayers grown on metastable, partially strain relaxed GeSn buffer layers. Atomic hydrogen is obtained by catalytic cracking of hydrogen gas on a hot tungsten filament in an ultra-high vacuum chamber. X-ray photoemission spectroscopy, reflection high energy electron spectroscopy, atomic force microscopy, secondary ion mass spectroscopy, and micro-Raman showed that an O- and C-free Ge surface was achieved, while maintaining the same roughness and strain condition of the as-deposited sample and without any Sn segregation, at a process temperature in the 100–300 °C range. 000189056 536__ $$0G:(DE-HGF)POF3-521$$a521 - Controlling Electron Charge-Based Phenomena (POF3-521)$$cPOF3-521$$fPOF III$$x0 000189056 588__ $$aDataset connected to CrossRef, juser.fz-juelich.de 000189056 7001_ $$0P:(DE-HGF)0$$aSabbagh, D.$$b1 000189056 7001_ $$0P:(DE-HGF)0$$aDe Seta, M.$$b2 000189056 7001_ $$0P:(DE-HGF)0$$aSodo, A.$$b3 000189056 7001_ $$0P:(DE-Juel1)138778$$aWirths, S.$$b4 000189056 7001_ $$0P:(DE-Juel1)125569$$aBuca, D.$$b5 000189056 7001_ $$0P:(DE-HGF)0$$aZaumseil, P.$$b6 000189056 7001_ $$0P:(DE-HGF)0$$aSchroeder, T.$$b7 000189056 7001_ $$0P:(DE-HGF)0$$aCapellini, G.$$b8$$eCorresponding Author 000189056 773__ $$0PERI:(DE-600)1476463-5$$a10.1063/1.4906616$$gVol. 117, no. 4, p. 045306 -$$n4$$p045306 -$$tJournal of applied physics$$v117$$x1089-7550$$y2015 000189056 8564_ $$uhttp://scitation.aip.org/content/aip/journal/jap/117/4/10.1063/1.4906616 000189056 8564_ $$uhttps://juser.fz-juelich.de/record/189056/files/JAP%202015%20hot%20wire%20Ge%20cleaning.pdf$$yOpenAccess 000189056 8564_ $$uhttps://juser.fz-juelich.de/record/189056/files/JAP%202015%20hot%20wire%20Ge%20cleaning.pdf?subformat=pdfa$$xpdfa$$yOpenAccess 000189056 909CO $$ooai:juser.fz-juelich.de:189056$$pdnbdelivery$$pdriver$$pVDB$$popen_access$$popenaire 000189056 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)138778$$aForschungszentrum Jülich GmbH$$b4$$kFZJ 000189056 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)125569$$aForschungszentrum Jülich GmbH$$b5$$kFZJ 000189056 9130_ $$0G:(DE-HGF)POF2-421$$1G:(DE-HGF)POF2-420$$2G:(DE-HGF)POF2-400$$aDE-HGF$$bSchlüsseltechnologien$$lGrundlagen für zukünftige Informationstechnologien$$vFrontiers of charge based Electronics$$x0 000189056 9131_ $$0G:(DE-HGF)POF3-521$$1G:(DE-HGF)POF3-520$$2G:(DE-HGF)POF3-500$$3G:(DE-HGF)POF3$$4G:(DE-HGF)POF$$aDE-HGF$$bKey Technologies$$lFuture Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT)$$vControlling Electron Charge-Based Phenomena$$x0 000189056 9141_ $$y2015 000189056 915__ $$0StatID:(DE-HGF)0150$$2StatID$$aDBCoverage$$bWeb of Science Core Collection 000189056 915__ $$0StatID:(DE-HGF)0100$$2StatID$$aJCR 000189056 915__ $$0StatID:(DE-HGF)0200$$2StatID$$aDBCoverage$$bSCOPUS 000189056 915__ $$0StatID:(DE-HGF)0110$$2StatID$$aWoS$$bScience Citation Index 000189056 915__ $$0StatID:(DE-HGF)0111$$2StatID$$aWoS$$bScience Citation Index Expanded 000189056 915__ $$0StatID:(DE-HGF)9900$$2StatID$$aIF < 5 000189056 915__ $$0StatID:(DE-HGF)0510$$2StatID$$aOpenAccess 000189056 915__ $$0StatID:(DE-HGF)1150$$2StatID$$aDBCoverage$$bCurrent Contents - Physical, Chemical and Earth Sciences 000189056 915__ $$0StatID:(DE-HGF)0300$$2StatID$$aDBCoverage$$bMedline 000189056 915__ $$0StatID:(DE-HGF)0199$$2StatID$$aDBCoverage$$bThomson Reuters Master Journal List 000189056 920__ $$lyes 000189056 9201_ $$0I:(DE-Juel1)PGI-9-20110106$$kPGI-9$$lHalbleiter-Nanoelektronik$$x0 000189056 9201_ $$0I:(DE-82)080009_20140620$$kJARA-FIT$$lJARA-FIT$$x1 000189056 980__ $$ajournal 000189056 980__ $$aVDB 000189056 980__ $$aUNRESTRICTED 000189056 980__ $$aI:(DE-Juel1)PGI-9-20110106 000189056 980__ $$aI:(DE-82)080009_20140620 000189056 9801_ $$aFullTexts