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@ARTICLE{DiGaspare:189056,
      author       = {Di Gaspare, L. and Sabbagh, D. and De Seta, M. and Sodo, A.
                      and Wirths, S. and Buca, D. and Zaumseil, P. and Schroeder,
                      T. and Capellini, G.},
      title        = {{E}pi-cleaning of {G}e/{G}e{S}n heterostructures1},
      journal      = {Journal of applied physics},
      volume       = {117},
      number       = {4},
      issn         = {1089-7550},
      address      = {Melville, NY},
      publisher    = {American Inst. of Physics},
      reportid     = {FZJ-2015-02298},
      pages        = {045306 -},
      year         = {2015},
      abstract     = {We demonstrate a very-low temperature cleaning technique
                      based on atomic hydrogen irradiation for highly $(1\%)$
                      tensile strained Ge epilayers grown on metastable, partially
                      strain relaxed GeSn buffer layers. Atomic hydrogen is
                      obtained by catalytic cracking of hydrogen gas on a hot
                      tungsten filament in an ultra-high vacuum chamber. X-ray
                      photoemission spectroscopy, reflection high energy electron
                      spectroscopy, atomic force microscopy, secondary ion mass
                      spectroscopy, and micro-Raman showed that an O- and C-free
                      Ge surface was achieved, while maintaining the same
                      roughness and strain condition of the as-deposited sample
                      and without any Sn segregation, at a process temperature in
                      the 100–300 °C range.},
      cin          = {PGI-9 / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000348998200054},
      doi          = {10.1063/1.4906616},
      url          = {https://juser.fz-juelich.de/record/189056},
}