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| 001 | 189056 | ||
| 005 | 20210129215308.0 | ||
| 024 | 7 | _ | |a 10.1063/1.4906616 |2 doi |
| 024 | 7 | _ | |a 0021-8979 |2 ISSN |
| 024 | 7 | _ | |a 0148-6349 |2 ISSN |
| 024 | 7 | _ | |a 1089-7550 |2 ISSN |
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| 037 | _ | _ | |a FZJ-2015-02298 |
| 041 | _ | _ | |a English |
| 082 | _ | _ | |a 530 |
| 100 | 1 | _ | |a Di Gaspare, L. |0 P:(DE-HGF)0 |b 0 |e Corresponding Author |
| 245 | _ | _ | |a Epi-cleaning of Ge/GeSn heterostructures1 |
| 260 | _ | _ | |a Melville, NY |c 2015 |b American Inst. of Physics |
| 336 | 7 | _ | |a article |2 DRIVER |
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| 336 | 7 | _ | |a Journal Article |0 0 |2 EndNote |
| 520 | _ | _ | |a We demonstrate a very-low temperature cleaning technique based on atomic hydrogen irradiation for highly (1%) tensile strained Ge epilayers grown on metastable, partially strain relaxed GeSn buffer layers. Atomic hydrogen is obtained by catalytic cracking of hydrogen gas on a hot tungsten filament in an ultra-high vacuum chamber. X-ray photoemission spectroscopy, reflection high energy electron spectroscopy, atomic force microscopy, secondary ion mass spectroscopy, and micro-Raman showed that an O- and C-free Ge surface was achieved, while maintaining the same roughness and strain condition of the as-deposited sample and without any Sn segregation, at a process temperature in the 100–300 °C range. |
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| 700 | 1 | _ | |a Sabbagh, D. |0 P:(DE-HGF)0 |b 1 |
| 700 | 1 | _ | |a De Seta, M. |0 P:(DE-HGF)0 |b 2 |
| 700 | 1 | _ | |a Sodo, A. |0 P:(DE-HGF)0 |b 3 |
| 700 | 1 | _ | |a Wirths, S. |0 P:(DE-Juel1)138778 |b 4 |
| 700 | 1 | _ | |a Buca, D. |0 P:(DE-Juel1)125569 |b 5 |
| 700 | 1 | _ | |a Zaumseil, P. |0 P:(DE-HGF)0 |b 6 |
| 700 | 1 | _ | |a Schroeder, T. |0 P:(DE-HGF)0 |b 7 |
| 700 | 1 | _ | |a Capellini, G. |0 P:(DE-HGF)0 |b 8 |e Corresponding Author |
| 773 | _ | _ | |a 10.1063/1.4906616 |g Vol. 117, no. 4, p. 045306 - |0 PERI:(DE-600)1476463-5 |n 4 |p 045306 - |t Journal of applied physics |v 117 |y 2015 |x 1089-7550 |
| 856 | 4 | _ | |u http://scitation.aip.org/content/aip/journal/jap/117/4/10.1063/1.4906616 |
| 856 | 4 | _ | |u https://juser.fz-juelich.de/record/189056/files/JAP%202015%20hot%20wire%20Ge%20cleaning.pdf |y OpenAccess |
| 856 | 4 | _ | |u https://juser.fz-juelich.de/record/189056/files/JAP%202015%20hot%20wire%20Ge%20cleaning.pdf?subformat=pdfa |x pdfa |y OpenAccess |
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