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@ARTICLE{Yazdi:189243,
author = {Yazdi, Sadegh and Kasama, Takeshi and Beleggia, Marco and
Samaie Yekta, Maryam and McComb, David W. and
Twitchett-Harrison, Alison C. and Dunin-Borkowski, Rafal},
title = {{T}owards quantitative electrostatic potential mapping of
working semiconductor devices using off-axis electron
holography},
journal = {Ultramicroscopy},
volume = {152},
issn = {0304-3991},
address = {Amsterdam},
publisher = {Elsevier Science},
reportid = {FZJ-2015-02431},
pages = {10 - 20},
year = {2015},
abstract = {Pronounced improvements in the understanding of
semiconductor device performance are expected if
electrostatic potential distributions can be measured
quantitatively and reliably under working conditions with
sufficient sensitivity and spatial resolution. Here, we
employ off-axis electron holography to characterize an
electrically-biased Si p–n junction by measuring its
electrostatic potential, electric field and charge density
distributions under working conditions. A comparison between
experimental electron holographic phase images and images
obtained using three-dimensional electrostatic potential
simulations highlights several remaining challenges to
quantitative analysis. Our results illustrate how the
determination of reliable potential distributions from phase
images of electrically biased devices requires electrostatic
fringing fields, surface charges, specimen preparation
damage and the effects of limited spatial resolution to be
taken into account.},
cin = {PGI-5},
ddc = {570},
cid = {I:(DE-Juel1)PGI-5-20110106},
pnm = {143 - Controlling Configuration-Based Phenomena (POF3-143)},
pid = {G:(DE-HGF)POF3-143},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000351945100002},
pubmed = {pmid:25576656},
doi = {10.1016/j.ultramic.2014.12.012},
url = {https://juser.fz-juelich.de/record/189243},
}