%0 Journal Article
%A Mikulics, M.
%A Hardtdegen, H.
%T Nano-LED array fabrication suitable for future single photon lithography
%J Nanotechnology
%V 26
%N 18
%@ 1361-6528
%C Bristol
%I IOP Publ.
%M FZJ-2015-02662
%P 185302 
%D 2015
%X We report on an alternative illumination concept for a future lithography based on single-photon emitters and important technological steps towards its implementation. Nano light-emitting diodes (LEDs) are chosen as the photon emitters. First, the development of their fabrication and their integration technology is presented, then their optical characteristics assessed. Last, size-controlled nano-LEDs, well positioned in an array, are electrically driven and utilized for illumination. Nanostructures are lithographically formed, demonstrating the feasibility of the approach. The potential of single-photon lithography to reach the ultimate scale limits in mass production is discussed.
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000353111400007
%$ pmid:25873158
%R 10.1088/0957-4484/26/18/185302
%U https://juser.fz-juelich.de/record/189508