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000189508 1001_ $$0P:(DE-Juel1)128613$$aMikulics, M.$$b0$$ufzj
000189508 245__ $$aNano-LED array fabrication suitable for future single photon lithography
000189508 260__ $$aBristol$$bIOP Publ.$$c2015
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000189508 520__ $$aWe report on an alternative illumination concept for a future lithography based on single-photon emitters and important technological steps towards its implementation. Nano light-emitting diodes (LEDs) are chosen as the photon emitters. First, the development of their fabrication and their integration technology is presented, then their optical characteristics assessed. Last, size-controlled nano-LEDs, well positioned in an array, are electrically driven and utilized for illumination. Nanostructures are lithographically formed, demonstrating the feasibility of the approach. The potential of single-photon lithography to reach the ultimate scale limits in mass production is discussed.
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000189508 7001_ $$0P:(DE-Juel1)125593$$aHardtdegen, H.$$b1$$eCorresponding Author$$ufzj
000189508 773__ $$0PERI:(DE-600)1362365-5$$a10.1088/0957-4484/26/18/185302$$gVol. 26, no. 18, p. 185302 -$$n18$$p185302 $$tNanotechnology$$v26$$x1361-6528$$y2015
000189508 8564_ $$uhttp://iopscience.iop.org/0957-4484/26/18/185302/
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