TY  - JOUR
AU  - Mikulics, M.
AU  - Hardtdegen, H.
TI  - Nano-LED array fabrication suitable for future single photon lithography
JO  - Nanotechnology
VL  - 26
IS  - 18
SN  - 1361-6528
CY  - Bristol
PB  - IOP Publ.
M1  - FZJ-2015-02662
SP  - 185302 
PY  - 2015
AB  - We report on an alternative illumination concept for a future lithography based on single-photon emitters and important technological steps towards its implementation. Nano light-emitting diodes (LEDs) are chosen as the photon emitters. First, the development of their fabrication and their integration technology is presented, then their optical characteristics assessed. Last, size-controlled nano-LEDs, well positioned in an array, are electrically driven and utilized for illumination. Nanostructures are lithographically formed, demonstrating the feasibility of the approach. The potential of single-photon lithography to reach the ultimate scale limits in mass production is discussed.
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000353111400007
C6  - pmid:25873158
DO  - DOI:10.1088/0957-4484/26/18/185302
UR  - https://juser.fz-juelich.de/record/189508
ER  -