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@ARTICLE{Mikulics:189508,
      author       = {Mikulics, M. and Hardtdegen, H.},
      title        = {{N}ano-{LED} array fabrication suitable for future single
                      photon lithography},
      journal      = {Nanotechnology},
      volume       = {26},
      number       = {18},
      issn         = {1361-6528},
      address      = {Bristol},
      publisher    = {IOP Publ.},
      reportid     = {FZJ-2015-02662},
      pages        = {185302},
      year         = {2015},
      abstract     = {We report on an alternative illumination concept for a
                      future lithography based on single-photon emitters and
                      important technological steps towards its implementation.
                      Nano light-emitting diodes (LEDs) are chosen as the photon
                      emitters. First, the development of their fabrication and
                      their integration technology is presented, then their
                      optical characteristics assessed. Last, size-controlled
                      nano-LEDs, well positioned in an array, are electrically
                      driven and utilized for illumination. Nanostructures are
                      lithographically formed, demonstrating the feasibility of
                      the approach. The potential of single-photon lithography to
                      reach the ultimate scale limits in mass production is
                      discussed.},
      cin          = {PGI-9 / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000353111400007},
      pubmed       = {pmid:25873158},
      doi          = {10.1088/0957-4484/26/18/185302},
      url          = {https://juser.fz-juelich.de/record/189508},
}