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| 001 | 189508 | ||
| 005 | 20220930130041.0 | ||
| 024 | 7 | _ | |a 10.1088/0957-4484/26/18/185302 |2 doi |
| 024 | 7 | _ | |a 0957-4484 |2 ISSN |
| 024 | 7 | _ | |a 1361-6528 |2 ISSN |
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| 037 | _ | _ | |a FZJ-2015-02662 |
| 082 | _ | _ | |a 530 |
| 100 | 1 | _ | |a Mikulics, M. |0 P:(DE-Juel1)128613 |b 0 |u fzj |
| 245 | _ | _ | |a Nano-LED array fabrication suitable for future single photon lithography |
| 260 | _ | _ | |a Bristol |c 2015 |b IOP Publ. |
| 336 | 7 | _ | |a Journal Article |b journal |m journal |0 PUB:(DE-HGF)16 |s 1429536906_28971 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a Output Types/Journal article |2 DataCite |
| 336 | 7 | _ | |a Journal Article |0 0 |2 EndNote |
| 336 | 7 | _ | |a ARTICLE |2 BibTeX |
| 336 | 7 | _ | |a JOURNAL_ARTICLE |2 ORCID |
| 336 | 7 | _ | |a article |2 DRIVER |
| 520 | _ | _ | |a We report on an alternative illumination concept for a future lithography based on single-photon emitters and important technological steps towards its implementation. Nano light-emitting diodes (LEDs) are chosen as the photon emitters. First, the development of their fabrication and their integration technology is presented, then their optical characteristics assessed. Last, size-controlled nano-LEDs, well positioned in an array, are electrically driven and utilized for illumination. Nanostructures are lithographically formed, demonstrating the feasibility of the approach. The potential of single-photon lithography to reach the ultimate scale limits in mass production is discussed. |
| 536 | _ | _ | |a 521 - Controlling Electron Charge-Based Phenomena (POF3-521) |0 G:(DE-HGF)POF3-521 |c POF3-521 |x 0 |f POF III |
| 588 | _ | _ | |a Dataset connected to CrossRef, juser.fz-juelich.de |
| 700 | 1 | _ | |a Hardtdegen, H. |0 P:(DE-Juel1)125593 |b 1 |e Corresponding Author |u fzj |
| 773 | _ | _ | |a 10.1088/0957-4484/26/18/185302 |g Vol. 26, no. 18, p. 185302 - |0 PERI:(DE-600)1362365-5 |n 18 |p 185302 |t Nanotechnology |v 26 |y 2015 |x 1361-6528 |
| 856 | 4 | _ | |u http://iopscience.iop.org/0957-4484/26/18/185302/ |
| 856 | 4 | _ | |u https://juser.fz-juelich.de/record/189508/files/0957-4484_26_18_185302.pdf |y Restricted |
| 856 | 4 | _ | |u https://juser.fz-juelich.de/record/189508/files/0957-4484_26_18_185302.pdf?subformat=pdfa |x pdfa |y Restricted |
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| 913 | 0 | _ | |a DE-HGF |b Schlüsseltechnologien |l Grundlagen für zukünftige Informationstechnologien |1 G:(DE-HGF)POF2-420 |0 G:(DE-HGF)POF2-421 |2 G:(DE-HGF)POF2-400 |v Frontiers of charge based Electronics |x 0 |
| 913 | 1 | _ | |a DE-HGF |b Key Technologies |l Future Information Technology - Fundamentals, Novel Concepts and Energy Efficiency (FIT) |1 G:(DE-HGF)POF3-520 |0 G:(DE-HGF)POF3-521 |2 G:(DE-HGF)POF3-500 |v Controlling Electron Charge-Based Phenomena |x 0 |4 G:(DE-HGF)POF |3 G:(DE-HGF)POF3 |
| 914 | 1 | _ | |y 2015 |
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