TY - CONF AU - Trellenkamp, Stefan AU - Mikulics, Martin AU - Windelen, Jürgen AU - Arango, Yulieth AU - Moers, Jürgen AU - Marso, Michel AU - Grützmacher, Detlev AU - Hardtdegen, Hilde TI - III-nitride nano-LEDs for single photon lithography M1 - FZJ-2015-02681 SN - 978-147995474-2 SP - 85-88 PY - 2014 AB - We fabricated and tested III-nitride (p-GaN/MQW/n-GaN/sapphire) based nano-LEDs designed for operation in the single photon lithography technique. The band edge luminescence energy of the III-nitride nano-LEDs depends linearly on the structure size. Our studies provide clear evidence that our technological process for the vertically integrated nano-LED emitters is perfectly suited for long term operation without any indication of degradation effects. This novel technology shows strong potential for a future flexible single photon lithography [1] which is applicable for molecular photonic and electronic circuits. T2 - Conference Proceedings - 10th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM 2014 CY - 20 Oct 2014 - 22 Oct 2014, Smolenice (Slovakei) Y2 - 20 Oct 2014 - 22 Oct 2014 M2 - Smolenice, Slovakei LB - PUB:(DE-HGF)8 DO - DOI:10.1109/ASDAM.2014.6998652 UR - https://juser.fz-juelich.de/record/189527 ER -