%0 Conference Paper
%A Goldsche, Matthias
%A Kaeinburg, P.
%A Neumann, Christoph
%A Mussler, Gregor
%A Trellenkamp, Stefan
%A Stampfer, Christoph
%T Low Temperature Compatible Electrostatic Comb-Drive Actuators for Straining Graphene
%M FZJ-2015-02796
%P 251-255
%D 2014
%B Proc. of the 9th Conf. on Nano/Micro Engineered and Molecular Systems
%C 13 Apr 2014 - 16 Apr 2014, Waikiki Beach, Hawaii (USA)
Y2 13 Apr 2014 - 16 Apr 2014
M2 Waikiki Beach, Hawaii, USA
%F PUB:(DE-HGF)8
%9 Contribution to a conference proceedings
%U https://juser.fz-juelich.de/record/189766