TY  - CONF
AU  - Goldsche, Matthias
AU  - Kaeinburg, P.
AU  - Neumann, Christoph
AU  - Mussler, Gregor
AU  - Trellenkamp, Stefan
AU  - Stampfer, Christoph
TI  - Low Temperature Compatible Electrostatic Comb-Drive Actuators for Straining Graphene
M1  - FZJ-2015-02796
SP  - 251-255
PY  - 2014
T2  - Proc. of the 9th Conf. on Nano/Micro Engineered and Molecular Systems
CY  - 13 Apr 2014 - 16 Apr 2014, Waikiki Beach, Hawaii (USA)
Y2  - 13 Apr 2014 - 16 Apr 2014
M2  - Waikiki Beach, Hawaii, USA
LB  - PUB:(DE-HGF)8
UR  - https://juser.fz-juelich.de/record/189766
ER  -