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000189773 0247_ $$2doi$$a10.1016/j.tsf.2013.10.078
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000189773 1001_ $$0P:(DE-Juel1)138778$$aWirths, S.$$b0$$eCorresponding Author
000189773 245__ $$aSiGeSn growth studies using reduced pressure chemical vapor deposition towards optoelectronic applications
000189773 260__ $$aAmsterdam [u.a.]$$bElsevier$$c2014
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000189773 520__ $$aIn this contribution, we propose a laser concept based on a double heterostructure consisting of tensile strained Ge as the active medium and SiGeSn ternaries as cladding layers. Electronic band-structure calculations were used to determine the Si and Sn concentrations yielding a type I heterostructure with appropriate band-offsets (50 meV) between strained Ge and SiGeSn. Reduced pressure chemical vapor deposition system was employed to study the laser structure growth. Detailed analyses regarding layer composition, crystal quality, surface morphology and elastic strain are presented. A strong temperature dependence of the Si and Sn incorporation has been obtained, ranging from 4 to 19 at.% Si and from 4 to 12 at.% Sn (growth temperatures between 350 °C and 475 °C). The high single crystalline quality and low surface roughness of 0.5–0.75 nm demonstrate that our layers are suitable for heterostructure laser fabrication.
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000189773 7001_ $$0P:(DE-Juel1)125569$$aBuca, D.$$b1$$eCorresponding Author
000189773 7001_ $$0P:(DE-HGF)0$$aIkonic, Z.$$b2
000189773 7001_ $$0P:(DE-HGF)0$$aHarrison, P.$$b3
000189773 7001_ $$0P:(DE-Juel1)128639$$aTiedemann, Andreas$$b4
000189773 7001_ $$0P:(DE-Juel1)125595$$aHolländer, B.$$b5
000189773 7001_ $$0P:(DE-Juel1)128637$$aStoica, T.$$b6
000189773 7001_ $$0P:(DE-Juel1)128617$$aMussler, G.$$b7
000189773 7001_ $$0P:(DE-Juel1)133840$$aBreuer, Uwe$$b8
000189773 7001_ $$0P:(DE-HGF)0$$aHartmann, J. M.$$b9
000189773 7001_ $$0P:(DE-Juel1)125588$$aGrützmacher, D.$$b10
000189773 7001_ $$0P:(DE-Juel1)128609$$aMantl, S.$$b11
000189773 773__ $$0PERI:(DE-600)1482896-0$$a10.1016/j.tsf.2013.10.078$$gVol. 557, p. 183 - 187$$p183 - 187$$tThin solid films$$v557$$x0040-6090$$y2014
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