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@ARTICLE{Hpkes:19931,
      author       = {Hüpkes, J. and Owen, J. I. and Pust, S. E. and Bunte, E.},
      title        = {{C}hemical {E}tching of {Z}inc {O}xide for {T}hin-{F}ilm
                      {S}ilicon {S}olar {C}ells},
      journal      = {ChemPhysChem},
      volume       = {13},
      address      = {Weinheim},
      publisher    = {Wiley-VCH Verl.},
      reportid     = {PreJuSER-19931},
      pages        = {66 - 73},
      year         = {2012},
      note         = {Record converted from JUWEL: 18.07.2013},
      comment      = {ChemPhysChem 2012, 13, 66 – 73},
      booktitle     = {ChemPhysChem 2012, 13, 66 – 73},
      abstract     = {Chemical etching is widely applied to texture the surface
                      of sputter-deposited zinc oxide for light scattering in
                      thin-film silicon solar cells. Based on experimental
                      findings from the literature and our own results we propose
                      a model that explains the etching behavior of ZnO depending
                      on the structural material properties and etching agent. All
                      grain boundaries are prone to be etched to a certain
                      threshold, that is defined by the deposition conditions and
                      etching solution. Additionally, several approaches to modify
                      the etching behavior through special preparation and etching
                      steps are provided.},
      keywords     = {J (WoSType)},
      cin          = {IEK-5},
      ddc          = {500},
      cid          = {I:(DE-Juel1)IEK-5-20101013},
      pnm          = {Erneuerbare Energien},
      pid          = {G:(DE-Juel1)FUEK401},
      shelfmark    = {Chemistry, Physical / Physics, Atomic, Molecular $\&$
                      Chemical},
      typ          = {PUB:(DE-HGF)16},
      pubmed       = {pmid:22162035},
      UT           = {WOS:000298913500007},
      doi          = {10.1002/cphc.201100738},
      url          = {https://juser.fz-juelich.de/record/19931},
}