%0 Conference Paper
%A Luysberg, Martina
%A Wendt, Fabian
%A Schäfer, Anna
%A Mantl, Siegfried
%A Lenk, Steffi
%A Niu, G.
%A Schroeder, T.
%A Mikulics, Martin
%A Winden, Andreas
%A Hardtdegen, Hilde
%A Tromm, Thomas Carl Ulrich
%A Schubert, Jürgen
%T Epitaxial high-k dielectrics:ternary rare-earth based oxides grown on semiconducting substrates
%M FZJ-2015-03331
%D 2015
%B MRS Conference
%C 6 Apr 2015 - 10 Apr 2015, San Francisco (USA)
Y2 6 Apr 2015 - 10 Apr 2015
M2 San Francisco, USA
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/201021