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Epitaxial high-k dielectrics:ternary rare-earth based oxides grown on semiconducting substrates
Luysberg, M.FZJ* ; Wendt, F. ; Schäfer, A.FZJ* ; Mantl, S.FZJ* ; Lenk, S.FZJ* ; Niu, G. ; Schroeder, T. ; Mikulics, M.FZJ* ; Winden, A. ; Hardtdegen, H.FZJ* ; Tromm, T. C. U.FZJ* ; Schubert, J.FZJ*
2015
2015MRS Conference, San FranciscoSan Francisco, USA, 6 Apr 2015 - 10 Apr 20152015-04-062015-04-10
Contributing Institute(s):
- Mikrostrukturforschung (PGI-5)
- Halbleiter-Nanoelektronik (PGI-9)
Research Program(s):
- 143 - Controlling Configuration-Based Phenomena (POF3-143) (POF3-143)
Appears in the scientific report
2015