TY  - JOUR
AU  - Meier, Matthias
AU  - Merdzhanova, T.
AU  - Paetzold, U. W.
AU  - Muthmann, S.
AU  - Mück, A.
AU  - Schmitz, Ralf
AU  - Gordijn, A.
TI  - In Situ Current Determination of a-Si/μc-Si Tandem Solar Cells via Transmission Measurements During Silicon PECVD
JO  - IEEE journal of photovoltaics
VL  - 2
IS  - 2
SN  - 2156-3381
CY  - New York, NY
PB  - IEEE
M1  - FZJ-2015-03484
SP  - 77 - 82
PY  - 2012
AB  - In situ optical transmission measurements performed during thin-film silicon plasma-enhanced chemical vapor deposition (PECVD) are presented. Hereto, the plasma emission was used as light source. With this setup information about thickness, crystallinity and absorption characteristic of the growing intrinsic silicon thin film can be obtained. By integrating the intrinsic layers in solar cells with p-i-n configuration, the layer information gained in situ during the PECVD process can be directly correlated to the generated short-circuit current of the solar cell. The intention of this paper is to show that, by using these transmission measurements for the estimation of solar cell currents, an in situ current matching of stacked a-Si/μc-Si tandem devices is possible, which is a useful extension of the process control techniques.
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000318425200001
DO  - DOI:10.1109/JPHOTOV.2011.2179413
UR  - https://juser.fz-juelich.de/record/201179
ER  -