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@ARTICLE{Krkknen:201480,
author = {Kärkkänen, Irina and Shkabko, Andrey and Heikkilä, Mikko
and Vehkamäki, Marko and Niinistö, Jaakko and Aslam,
Nabeel and Meuffels, Paul and Ritala, Mikko and Leskelä,
Markku and Waser, Rainer and Hoffmann-Eifert, Susanne},
title = {{I}mpedance spectroscopy study of the unipolar and bipolar
resistive switching states of atomic layer deposited
polycrystalline {Z}r{O} $_{2}$ thin films},
journal = {Physica status solidi / A},
volume = {212},
number = {4},
issn = {1862-6300},
address = {Weinheim},
publisher = {Wiley-VCH},
reportid = {FZJ-2015-03775},
pages = {751 - 766},
year = {2015},
abstract = {The polarity of the resistive switching (RS) characteristic
of metal-oxide-metal devices from atomic layer deposited
polycrystalline ZrO2 films was studied by means of impedance
spectroscopy. Pt/ZrO2/Ti/Pt cells made with 10 nm Ti and
30 nm Pt capping top electrodes, served as unipolar
switching (US) devices. Bipolar switching (BS) devices were
represented by Pt/ZrO2/30 nm TiN cells. Temperature
measurements of the ON-state resistances clearly show
metallic and semiconducting behavior for the US and BS
cells, respectively. The pristine and the ON and OFF states
of the devices were analyzed by means of impedance
spectroscopy. All ZrO2 based RS devices exhibited similar
impedance characteristics in the pristine states. In
contrast, after electroforming clear differences in the
Nyquist-plots of the US and BS devices were observed. The
effect of the device structure on the RS polarity is
discussed under consideration of the pillar-shaped grainy
microstructure of the ZrO2 thin films. An empirical model
based on redox reactions between ZrO2 and the non-noble
metal electrode is proposed emphasizing defect formation
prior at the ZrO2 grain boundaries.},
cin = {PGI-7 / JARA-FIT},
ddc = {530},
cid = {I:(DE-Juel1)PGI-7-20110106 / $I:(DE-82)080009_20140620$},
pnm = {524 - Controlling Collective States (POF3-524)},
pid = {G:(DE-HGF)POF3-524},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000352820100008},
doi = {10.1002/pssa.201431489},
url = {https://juser.fz-juelich.de/record/201480},
}