TY  - JOUR
AU  - Cooper, D.
AU  - Dunin-Borkowski, Rafal
TI  - Interpretation of phase images of delta-doped layers
JO  - Microscopy
VL  - 62
IS  - suppl 1
SN  - 2050-5701
CY  - Tokyo
PB  - Oxford Univ. Press
M1  - FZJ-2015-03904
SP  - S87 - S98
PY  - 2013
AB  - An approach is presented that allows independent determination of the mean inner potential contribution to a phase image of a highly doped layer in a semiconductor measured using off-axis electron holography, in order to quantify the contribution to the recorded phase from the dopant potential alone. The method takes into account the possible presence of both substitutional and interstitial dopant atoms and is used here to analyse an experimental phase image of 12 delta-doped B layers in Si that are separated from each other by <6 nm. 
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000319470800009
DO  - DOI:10.1093/jmicro/dft014
UR  - https://juser.fz-juelich.de/record/201610
ER  -