TY - JOUR
AU - Knoll, Lars
AU - Zhao, Qing-Tai
AU - Nichau, Alexander
AU - Trellenkamp, Stefan
AU - Richter, Simon
AU - Schafer, Anna
AU - Esseni, David
AU - Selmi, Luca
AU - Bourdelle, Konstantin K.
AU - Mantl, Siegfried
TI - Inverters With Strained Si Nanowire Complementary Tunnel Field-Effect Transistors
JO - IEEE electron device letters
VL - 34
IS - 6
SN - 1558-0563
CY - New York, NY
PB - IEEE
M1 - FZJ-2015-04626
SP - 813 - 815
PY - 2013
AB - Inverters based on uniaxially tensile strained Si (sSi) nanowire (NW) tunneling field-effect transistors (TFETs) are fabricated. Tilted dopant implantation using the gate as a shadow mask allows self-aligned formation of p-i-n TFETs. The steep junctions formed by dopant segregation at low temperatures improve the band-to-band tunneling, resulting in higher on-currents of n- and p-TFETs of > 10 μA/μm at VDS=0.5 V. The subthreshold slope for n-channel TFETs reaches a minimum value of 30 mV/dec, and is <; 60 mV/dec over one order of magnitude of drain current. The first sSi NW complementary TFET inverters show sharp transitions and fairly high static gain even at very lowVDD=0.2 V. The first transient response analysis of the inverters shows clear output voltage overshoots and a fall time of 2 ns at VDD=1.0 V.
LB - PUB:(DE-HGF)16
UR - <Go to ISI:>//WOS:000319460800032
DO - DOI:10.1109/LED.2013.2258652
UR - https://juser.fz-juelich.de/record/202365
ER -