TY  - JOUR
AU  - Houben, L.
AU  - Heidelmann, M.
AU  - Gunkel, F.
TI  - Spatial resolution and radiation damage in quantitative high-resolution STEM-EEL spectroscopy in oxides
JO  - Micron
VL  - 43
SN  - 0968-4328
CY  - New York, NY [u.a.]
PB  - Elsevier
M1  - PreJuSER-20311
SP  - 532 - 537
PY  - 2012
N1  - Record converted from VDB: 12.11.2012
AB  - The chemical analysis on the atomic scale in a scanning transmission electron microscope bears a number of challenges. These are an unambiguous assignment of a spectroscopic signal to a sample location and sufficient signal above noise for quantification. Modern aberration-corrected optics provide intense electron probes allowing for the highest spatial resolution and beam current density possible. On the other hand, non-destructive analysis requires low irradiation doses, so that there is a limit to the achievable signal-to-noise ratio. Here, we employ the StripeSTEM method that sacrifices the resolution in one spatial dimension in return for decreased radiation damage to the sample. Using this technique, radiation damage effects and achievable quantification accuracy are examined on the example of bulk SrTiO3 and a one unit cell thick layer of LaAlO3 in SrTiO3. The results show that valency artefacts are expected for conventional recording conditions where the electron dose is concentrated to a few atomic columns. Likewise a high accuracy for measuring the oxygen defect chemistry without radiation damage requires spreading out the irradiation dose. (C) 2011 Elsevier Ltd. All rights reserved.
KW  - J (WoSType)
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000301702400006
DO  - DOI:10.1016/j.micron.2011.10.006
UR  - https://juser.fz-juelich.de/record/20311
ER  -