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@ARTICLE{Houben:20311,
author = {Houben, L. and Heidelmann, M. and Gunkel, F.},
title = {{S}patial resolution and radiation damage in quantitative
high-resolution {STEM}-{EEL} spectroscopy in oxides},
journal = {Micron},
volume = {43},
issn = {0968-4328},
address = {New York, NY [u.a.]},
publisher = {Elsevier},
reportid = {PreJuSER-20311},
pages = {532 - 537},
year = {2012},
note = {Record converted from VDB: 12.11.2012},
abstract = {The chemical analysis on the atomic scale in a scanning
transmission electron microscope bears a number of
challenges. These are an unambiguous assignment of a
spectroscopic signal to a sample location and sufficient
signal above noise for quantification. Modern
aberration-corrected optics provide intense electron probes
allowing for the highest spatial resolution and beam current
density possible. On the other hand, non-destructive
analysis requires low irradiation doses, so that there is a
limit to the achievable signal-to-noise ratio. Here, we
employ the StripeSTEM method that sacrifices the resolution
in one spatial dimension in return for decreased radiation
damage to the sample. Using this technique, radiation damage
effects and achievable quantification accuracy are examined
on the example of bulk SrTiO3 and a one unit cell thick
layer of LaAlO3 in SrTiO3. The results show that valency
artefacts are expected for conventional recording conditions
where the electron dose is concentrated to a few atomic
columns. Likewise a high accuracy for measuring the oxygen
defect chemistry without radiation damage requires spreading
out the irradiation dose. (C) 2011 Elsevier Ltd. All rights
reserved.},
keywords = {J (WoSType)},
cin = {PGI-7 / JARA-FIT / PGI-6},
ddc = {570},
cid = {I:(DE-Juel1)PGI-7-20110106 / $I:(DE-82)080009_20140620$ /
I:(DE-Juel1)PGI-6-20110106},
pnm = {Grundlagen für zukünftige Informationstechnologien},
pid = {G:(DE-Juel1)FUEK412},
shelfmark = {Microscopy},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000301702400006},
doi = {10.1016/j.micron.2011.10.006},
url = {https://juser.fz-juelich.de/record/20311},
}