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@ARTICLE{Yu:203147,
      author       = {Yu, W. and Zhang, B. and Liu, C. and Zhao, Y. and Wu, W. R.
                      and Xue, Z. Y. and Chen, M. and Buca, D. and Hartmann, J.-M.
                      and Wang, X. and Zhao, Q. T. and Mantl, S.},
      title        = {{I}mpact of {S}i cap, strain and temperature on the hole
                      mobility of (s){S}i/s{S}i{G}e/(s){SOI} quantum-well
                      p-{MOSFET}s},
      journal      = {Microelectronic engineering},
      volume       = {113},
      issn         = {0167-9317},
      address      = {[S.l.] @},
      publisher    = {Elsevier},
      reportid     = {FZJ-2015-05156},
      pages        = {5 - 9},
      year         = {2014},
      abstract     = {Quantum-well p-MOSFETs are fabricated on (strained)
                      Si/strained SiGe/(strained) SOI hetero-structure substrates
                      and the effects of Si cap, strain and temperature on hole
                      mobility are investigated. The Si cap layer which behaves as
                      a passivation layer for the SiGe improves the hole mobility
                      by suppressing the scattering due to charges in the high-κ
                      layer and at the high-κ interface. High strain in SiGe
                      enhances the Ge interdiffusion during the thermal process,
                      leading to reduced hole mobilities. The transistors are also
                      characterized at very low temperatures and the scattering
                      mechanism is discussed.},
      cin          = {PGI-9 / JARA-FIT},
      ddc          = {620},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000327293500002},
      doi          = {10.1016/j.mee.2013.06.015},
      url          = {https://juser.fz-juelich.de/record/203147},
}