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@ARTICLE{Greenlee:204890,
      author       = {Greenlee, Jordan D. and Specht, Petra and Anderson, Travis
                      J. and Koehler, Andrew D. and Weaver, Bradley D. and
                      Luysberg, Martina and Dubon, Oscar D. and Kub, Francis J.
                      and Weatherford, Todd R. and Hobart, Karl D.},
      title        = {{D}egradation mechanisms of 2 {M}e{V} proton irradiated
                      {A}l{G}a{N}/{G}a{N} {HEMT}s},
      journal      = {Applied physics letters},
      volume       = {107},
      number       = {8},
      issn         = {1077-3118},
      address      = {Melville, NY},
      publisher    = {American Inst. of Physics},
      reportid     = {FZJ-2015-05483},
      pages        = {083504 -},
      year         = {2015},
      abstract     = {Proton-induced damage in AlGaN/GaN HEMTs was investigated
                      using energy-dispersive X-ray spectroscopy (EDS) and
                      transmission electron microscopy (TEM), and simulated using
                      a Monte Carlo technique. The results were correlated to
                      electrical degradation using Hall measurements. It was
                      determined by EDS that the interface between GaN and AlGaN
                      in the irradiated HEMT was broadened by 2.2 nm, as
                      estimated by the width of the Al EDS signal compared to the
                      as-grown interface. The simulation results show a similar Al
                      broadening effect. The extent of interfacial roughening was
                      examined using high resolution TEM. At a 2 MeV proton
                      fluence of 6 × 1014 H+/cm2, the electrical effects
                      associated with the Al broadening and surface roughening
                      include a degradation of the ON-resistance and a decrease in
                      the electron mobility and 2DEG sheet carrier density by
                      $28.9\%$ and $12.1\%,$ respectively.},
      cin          = {PGI-5},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-5-20110106},
      pnm          = {143 - Controlling Configuration-Based Phenomena (POF3-143)},
      pid          = {G:(DE-HGF)POF3-143},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000360593900071},
      doi          = {10.1063/1.4929583},
      url          = {https://juser.fz-juelich.de/record/204890},
}