%0 Conference Paper
%A Nichau, A.
%A Schubert, J.
%A Rubio-Zuazo, J.
%A Besmehn, A.
%A Schnee, M.
%A Schäfer, A.
%A Castro, G.
%A Mantl, S.
%T Characterization of Lanthanum Lutetium oxide high k / metal gate stacks for CMOS process integration
%M PreJuSER-21119
%D 2012
%Z Record converted from VDB: 12.11.2012
%< SpLine Beamline Users' Meeting
Y2 16 Apr 2012
M2 Madrid, 
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/21119