TY  - CONF
AU  - Nichau, A.
AU  - Schubert, J.
AU  - Rubio-Zuazo, J.
AU  - Besmehn, A.
AU  - Schnee, M.
AU  - Schäfer, A.
AU  - Castro, G.
AU  - Mantl, S.
TI  - Characterization of Lanthanum Lutetium oxide high k / metal gate stacks for CMOS process integration
M1  - PreJuSER-21119
PY  - 2012
N1  - Record converted from VDB: 12.11.2012
Y2  - 16 Apr 2012
M2  - Madrid, 
LB  - PUB:(DE-HGF)6
UR  - https://juser.fz-juelich.de/record/21119
ER  -