%0 Conference Paper
%A Schmelzer, S.
%A Böttger, U.
%A Waser, R.
%T Tantalum oxide ultra-thin films by metal oxidation
%M PreJuSER-21898
%D 2012
%Z Record converted from VDB: 12.11.2012
%< Nature Conference - Frontiers in Electronic Materials
Y2 17 Jun 2012
M2 Aachen, 
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/21898