TY  - CONF
AU  - Schmelzer, S.
AU  - Böttger, U.
AU  - Waser, R.
TI  - Tantalum oxide ultra-thin films by metal oxidation
M1  - PreJuSER-21898
PY  - 2012
N1  - Record converted from VDB: 12.11.2012
Y2  - 17 Jun 2012
M2  - Aachen, 
LB  - PUB:(DE-HGF)6
UR  - https://juser.fz-juelich.de/record/21898
ER  -