%0 Conference Paper
%A Schmelzer, S.
%A Böttger, U.
%A Waser, R.
%T Investigation of interfacial passive layers in SrTiO3 ultra thin film capacitors on silicon substrates
%M PreJuSER-21900
%D 2012
%Z Record converted from VDB: 12.11.2012
%< Materials Research Society Spring Meeting
Y2 24 Apr 2012
M2 San Francisco, USA, 
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/21900