TY  - CONF
AU  - Schmelzer, S.
AU  - Böttger, U.
AU  - Waser, R.
TI  - Investigation of interfacial passive layers in SrTiO3 ultra thin film capacitors on silicon substrates
M1  - PreJuSER-21900
PY  - 2012
N1  - Record converted from VDB: 12.11.2012
Y2  - 24 Apr 2012
M2  - San Francisco, USA, 
LB  - PUB:(DE-HGF)6
UR  - https://juser.fz-juelich.de/record/21900
ER  -