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@INPROCEEDINGS{Schmelzer:21900,
author = {Schmelzer, S. and Böttger, U. and Waser, R.},
title = {{I}nvestigation of interfacial passive layers in
{S}r{T}i{O}3 ultra thin film capacitors on silicon
substrates},
reportid = {PreJuSER-21900},
year = {2012},
note = {Record converted from VDB: 12.11.2012},
comment = {Materials Research Society Spring Meeting},
booktitle = {Materials Research Society Spring
Meeting},
month = {Apr},
date = {2012-04-24},
organization = {San Francisco, USA, 24 Apr 2012},
cin = {JARA-FIT / PGI-7},
cid = {$I:(DE-82)080009_20140620$ / I:(DE-Juel1)PGI-7-20110106},
pnm = {Grundlagen für zukünftige Informationstechnologien},
pid = {G:(DE-Juel1)FUEK412},
typ = {PUB:(DE-HGF)6},
url = {https://juser.fz-juelich.de/record/21900},
}