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@INPROCEEDINGS{Nichau:23341,
      author       = {Nichau, A. and Schubert, J. and Rubio-Zuazo, J. and
                      Besmehn, A. and Schnee, M. and Schäfer, A. and Castro, G.R.
                      and Mantl, S.},
      title        = {{C}haracterization of {L}anthanum {L}utetium oxide high-k /
                      metal gate stacks for {CMOS} process integration},
      reportid     = {PreJuSER-23341},
      year         = {2012},
      note         = {Record converted from VDB: 12.11.2012},
      comment      = {SpLine Users' Meeting},
      booktitle     = {SpLine Users' Meeting},
      month         = {Apr},
      date          = {2012-04-16},
      organization  = {Madrid, Spanien, 16 Apr 2012},
      cin          = {PGI-9 / JARA-FIT},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      typ          = {PUB:(DE-HGF)24},
      url          = {https://juser.fz-juelich.de/record/23341},
}