%0 Conference Paper
%A Nichau, A.
%A Schubert, J.
%A Rubio-Zuazo, J.
%A Besmehn, A.
%A Schnee, M.
%A Schäfer, A.
%A Castro, G.R.
%A Mantl, S.
%T Characterization of Lanthanum Lutetium oxide high-k / metal gate stacks for CMOS process integration
%M PreJuSER-23342
%D 2012
%Z Record converted from VDB: 12.11.2012
%< Wilhelm and Else Heraeus Physics School: Microelectronics for Society: "More than Moore" expands "More Moore
Y2 10 Jun 2012
M2 Bad Honnef, 
%F PUB:(DE-HGF)24
%9 Poster
%U https://juser.fz-juelich.de/record/23342