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TY - CONF AU - Nichau, A. AU - Schubert, J. AU - Rubio-Zuazo, J. AU - Besmehn, A. AU - Schnee, M. AU - Schäfer, A. AU - Castro, G.R. AU - Mantl, S. TI - Characterization of Lanthanum Lutetium oxide high-k / metal gate stacks for CMOS process integration M1 - PreJuSER-23342 PY - 2012 N1 - Record converted from VDB: 12.11.2012 Y2 - 10 Jun 2012 M2 - Bad Honnef, LB - PUB:(DE-HGF)24 UR - https://juser.fz-juelich.de/record/23342 ER -