%0 Conference Paper
%A Schäfer, A.
%A Tiedemann, A.
%A Nichau, A.
%A Lupták, R.
%A Mußmann, V.
%A Schubert, J.
%A Mantl, S.
%T Using ALD and AVD-techniques for scaled gate stacks
%M PreJuSER-23343
%D 2012
%Z Record converted from VDB: 12.11.2012
%< Wilhelm and Else Heraeus Physics School: Microelectronics for Society: "More than Moore" expands "More Moore
Y2 10 Jun 2012
M2 Bad Honnef, 
%F PUB:(DE-HGF)24
%9 Poster
%U https://juser.fz-juelich.de/record/23343