000023343 001__ 23343
000023343 005__ 20180210123119.0
000023343 037__ $$aPreJuSER-23343
000023343 1001_ $$0P:(DE-Juel1)144017$$aSchäfer, A.$$b0$$uFZJ
000023343 1112_ $$cBad Honnef$$d2012-06-10
000023343 245__ $$aUsing ALD and AVD-techniques for scaled gate stacks
000023343 260__ $$c2012
000023343 29510 $$aWilhelm and Else Heraeus Physics School: Microelectronics for Society: "More than Moore" expands "More Moore
000023343 3367_ $$0PUB:(DE-HGF)24$$2PUB:(DE-HGF)$$aPoster
000023343 3367_ $$033$$2EndNote$$aConference Paper
000023343 3367_ $$2DataCite$$aOutput Types/Conference Poster
000023343 3367_ $$2DRIVER$$aconferenceObject
000023343 3367_ $$2ORCID$$aCONFERENCE_POSTER
000023343 3367_ $$2BibTeX$$aINPROCEEDINGS
000023343 500__ $$aRecord converted from VDB: 12.11.2012
000023343 536__ $$0G:(DE-Juel1)FUEK412$$2G:(DE-HGF)$$aGrundlagen für zukünftige Informationstechnologien$$cP42$$x0
000023343 7001_ $$0P:(DE-Juel1)128639$$aTiedemann, A.$$b1$$uFZJ
000023343 7001_ $$0P:(DE-Juel1)VDB88502$$aNichau, A.$$b2$$uFZJ
000023343 7001_ $$0P:(DE-Juel1)VDB96622$$aLupták, R.$$b3$$uFZJ
000023343 7001_ $$0P:(DE-Juel1)VDB109725$$aMußmann, V.$$b4$$uFZJ
000023343 7001_ $$0P:(DE-Juel1)128631$$aSchubert, J.$$b5$$uFZJ
000023343 7001_ $$0P:(DE-Juel1)VDB4959$$aMantl, S.$$b6$$uFZJ
000023343 909CO $$ooai:juser.fz-juelich.de:23343$$pVDB
000023343 9131_ $$0G:(DE-Juel1)FUEK412$$1G:(DE-HGF)POF2-420$$2G:(DE-HGF)POF2-400$$bSchlüsseltechnologien$$kP42$$lGrundlagen für zukünftige Informationstechnologien (FIT)$$vGrundlagen für zukünftige Informationstechnologien$$x0
000023343 9141_ $$y2012
000023343 9201_ $$0I:(DE-82)080009_20140620$$gJARA$$kJARA-FIT$$lJülich-Aachen Research Alliance - Fundamentals of Future Information Technology$$x1
000023343 9201_ $$0I:(DE-Juel1)PGI-9-20110106$$gPGI$$kPGI-9$$lHalbleiter-Nanoelektronik$$x0
000023343 970__ $$aVDB:(DE-Juel1)140466
000023343 980__ $$aVDB
000023343 980__ $$aConvertedRecord
000023343 980__ $$aposter
000023343 980__ $$aI:(DE-82)080009_20140620
000023343 980__ $$aI:(DE-Juel1)PGI-9-20110106
000023343 980__ $$aUNRESTRICTED
000023343 981__ $$aI:(DE-Juel1)PGI-9-20110106
000023343 981__ $$aI:(DE-Juel1)VDB881