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@INPROCEEDINGS{Schfer:23343,
      author       = {Schäfer, A. and Tiedemann, A. and Nichau, A. and Lupták,
                      R. and Mußmann, V. and Schubert, J. and Mantl, S.},
      title        = {{U}sing {ALD} and {AVD}-techniques for scaled gate stacks},
      reportid     = {PreJuSER-23343},
      year         = {2012},
      note         = {Record converted from VDB: 12.11.2012},
      comment      = {Wilhelm and Else Heraeus Physics School: Microelectronics
                      for Society: "More than Moore" expands "More Moore},
      booktitle     = {Wilhelm and Else Heraeus Physics
                       School: Microelectronics for Society:
                       "More than Moore" expands "More Moore},
      month         = {Jun},
      date          = {2012-06-10},
      organization  = {Bad Honnef, 10 Jun 2012},
      cin          = {JARA-FIT / PGI-9},
      cid          = {$I:(DE-82)080009_20140620$ / I:(DE-Juel1)PGI-9-20110106},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      typ          = {PUB:(DE-HGF)24},
      url          = {https://juser.fz-juelich.de/record/23343},
}