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| Hauptseite > Publikationsdatenbank > Using ALD and AVD-techniques for scaled gate stacks > print |
| 001 | 23343 | ||
| 005 | 20180210123119.0 | ||
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| 100 | 1 | _ | |a Schäfer, A. |b 0 |u FZJ |0 P:(DE-Juel1)144017 |
| 111 | 2 | _ | |c Bad Honnef |d 2012-06-10 |
| 245 | _ | _ | |a Using ALD and AVD-techniques for scaled gate stacks |
| 260 | _ | _ | |c 2012 |
| 295 | 1 | 0 | |a Wilhelm and Else Heraeus Physics School: Microelectronics for Society: "More than Moore" expands "More Moore |
| 336 | 7 | _ | |a Poster |0 PUB:(DE-HGF)24 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a Conference Paper |0 33 |2 EndNote |
| 336 | 7 | _ | |a Output Types/Conference Poster |2 DataCite |
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| 336 | 7 | _ | |a INPROCEEDINGS |2 BibTeX |
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| 700 | 1 | _ | |a Tiedemann, A. |b 1 |u FZJ |0 P:(DE-Juel1)128639 |
| 700 | 1 | _ | |a Nichau, A. |b 2 |u FZJ |0 P:(DE-Juel1)VDB88502 |
| 700 | 1 | _ | |a Lupták, R. |b 3 |u FZJ |0 P:(DE-Juel1)VDB96622 |
| 700 | 1 | _ | |a Mußmann, V. |b 4 |u FZJ |0 P:(DE-Juel1)VDB109725 |
| 700 | 1 | _ | |a Schubert, J. |b 5 |u FZJ |0 P:(DE-Juel1)128631 |
| 700 | 1 | _ | |a Mantl, S. |b 6 |u FZJ |0 P:(DE-Juel1)VDB4959 |
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| 914 | 1 | _ | |y 2012 |
| 920 | 1 | _ | |0 I:(DE-82)080009_20140620 |k JARA-FIT |l Jülich-Aachen Research Alliance - Fundamentals of Future Information Technology |g JARA |x 1 |
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